I roto i te ao whakatakotoranga kiriata angiangi e tere whanake ana,ngā whāinga whakapūkara parahi parakore-teiteikei te whai tonu i tētahi tūranga nui ki te whakahohe i te hanga hangarau haurua-ā-ira matatau, ngā hangarau whakaatu, me ngā otinga pūngao whakahou. I te mea ko te hiahia o te ao mō ngā taputapu hiko iti ake, tere ake, me te whai hua ake e akiaki ana i te auahatanga, ko te kawe hiko tino pai o te parahi me te hototahi ki ngā tukanga whakatakoto kohu tinana (PVD) e mea nui ai ēnei whāinga. I te mea ka pumau ngā utu parahi ki ngā taumata teitei i te tau 2026, kua neke te arotahi o te umanga ki ngā whāinga tino-teitei-te-parakore (4N–6N) e whakarite ana i ngā kiriata angiangi kore hapa me ngā hua tukanga pai ake.

Ka tirohia e tēnei tuhinga ngā momo matua o ngā ūnga whakapūkara parahi, ā rātou mahi motuhake, ngā ahumahi tono matua, me ngā āhuatanga rauemi e kore ai e taea te whakakapi i te parahi i roto i ngā horopaki tino mahi teitei.

Ngā momo rerekē o ngā ūnga pupuhi parakore-teitei, tae atu ki ngā pereti tapawhā papatahi, ngā āhua ritenga, me ngā huihuinga here e whakamahia whānuitia ana i roto i ngā pūnaha pupuhi magnetron.

Ngā Momo Noa o ngā Whāinga Parahi me ā rātou Mahi

Ka hangaia ngā whāinga whakapūpū parahi kia rite ki ngā whakaritenga tino tika, ko te tikanga he taumata parakore o te 99.99% (4N) ki te 99.9999% (6N), he hanganga pai te kakano, me te kiato teitei (>99%). Ko ngā āhua matua ko:

1. Ngā Whāinga Papatahi(Pereti Tapawhā, Pereti Tapawhā rānei)Ko te whirihoranga tino noa mō ngā pūnaha magnetron sputtering paerewa. Ka whakaratohia e ēnei ūnga papatahi te horo ōrite me te whakamahinga rauemi teitei i roto i ngā tono paninga rohe-rahi.
2. Ngā Whāinga Kōpae Porowhita He pai mō te rangahau, te whanaketanga, me ngā katote whakaputa iti iho. He tino hototahi ngā kōpae ki ngā aukume hurihuri, pūmau rānei, e āhei ai te whakahaere tika i te matotoru o te kiriata.
3. Ngā Whāinga Hurihuri (Porotaka, Ngongo rānei)I hangaia mō ngā pūnaha magnetron hurihuri, ka taea e ēnei te whakamahi rauemi i ngā reiti teitei ake (tae atu ki te 80–90%) ki te whakaritea ki ngā ūnga papatahi, ā, he pai ake ēnei mō ngā raina paninga ahumahi nui-rahi.
4. Ngā Whāinga HereaE aro ana ki ngā pereti tautoko parahi, molybdenum rānei kua herea ki te indium, ki te elastomer rānei, hei whakapai ake i te whakahaere wera me te pumau ā-pūkaha i te wā e pupuhi ana te mana nui.

Ko ēnei momo, e wātea ana i roto i ngā taumata parahi paerewa me ngā taumata ritenga, he mea hanga kia tino pumau te plasma, kia iti ake te whakaputa matūriki, me ngā reiti whakatakotoranga ōrite.

Ngā Ahumahi Matua e Whakamahi ana i ngā Whāinga Parahi i te Tau 2026

He mea nui ngā whāinga parahi parakore teitei puta noa i ētahi rāngai tipu tere:

• Hanganga Ārahi-Hau→ Ka mahi ngā kiriata parahi hei paparanga purapura me hei paparanga ārai i roto i ngā tukanga damascene mō ngā hononga i roto i ngā pona matatau (iti iho i te 5nm).
• Ngā Whakaaturanga Papatahi→ Whakamahia i roto i ngā whakaaturanga TFT-LCD, AMOLED, me ngā whakaaturanga ngāwari mō ngā irahiko kuaha, ngā raina pūtake/waikeri, me ngā paparanga whakaata.
• Ngā pūngao whakaahua→ He mea nui mō ngā pūtau hihi-angiangi CIGS (copper indium gallium selenide) me ngā hanganga perovskite tandem.
• Ngā Tirohanga Whānui me ngā Paninga Whakapaipai→ Whakamahia ki te karaihe hoahoanga, ki ngā whakaata motuka, me ngā paninga ārai-whakaata.
• Te Rokiroki Raraunga me ngā MEMS→ E whakamahia ana i roto i ngā pāpāho hopu aukume me ngā pūnaha moroiti-hiko-mīhini.

I te whānui haere tonu o ngā maramara AI, ngā hanganga 5G/6G, me te pūngao hou, ka piki haere te hiahia mō ngā hangarau ponongā whāinga whakapūkara parahi parakore-teiteie kaha tonu ana.

Ngā Painga Matua me te Take e Noho Tūturu ai te Parahi

He maha ngā painga hangarau o ngā ūnga parahi e kore e taea te whakataurite ki ētahi atu huarahi:

1. Te Arahi Hiko Pai Rawa— Ko te parahi te mea e whakarato ana i te ātete iti rawa (~1.68 µΩ·cm) i roto i ngā konganuku noa, e āhei ai te whakaiti i ngā whakaroa RC me te whakapai ake i te mahi a te taputapu.
2. Te ōritetanga me te piri pai o te kiriata— Ka whakaputa ngā ūnga angiangi i ngā kiriata matotoru, iti te hapa, me te hipoki hikoinga pai rawa atu i roto i ngā āhuatanga ōwehenga-āhua teitei.
3. Te Arahi Wera Teitei— Ka āwhina i te tohatoha wera pai i te wā e pupuhi ana, ka taea ai te whakapiki ake i te mātotoru mana me te tere ake o te whakatakotoranga.
4. Te Hototahi ki ngā Tukanga o nāianei— Whakaurunga maeneene ki ngā huinga taputapu PVD kua pakeke me te iti o ngā raruraru āwhata, āwhata rānei ina whakamahia ana ngā ūnga kounga teitei.
5. Te Whakawhanuitanga Whai Hua— Ahakoa te nui o ngā utu mō ngā rauemi mata, ko te parahi te mea pai rawa atu mō te whakaputanga rahinga i waenga i te mahi me te utu.

Te Whakakapinga i roto i ngā Tono HirangaAhakoa i whakamahia te konumohe mō ngā hononga hiko i ngā wā o mua, ko te whakamahinga o te parahi i te mutunga o te tekau tau atu i 1990 (te tukanga damascene a IBM) i tino whakapai ake i te tere maramara me te whai hua o te mana—he painga kāore e taea e te konumohe te tārua nā te teitei ake o te ātete. Ko ngā momo rerekē pēnei i te hiriwa ka pāngia e ngā raruraru hiko, ko te ruthenium, ko te cobalt rānei ka waiho hei ārai tino-angiangi anake. I roto i ngā hononga hiko haurua-ira me ngā tono auau-teitei, mā te whakakapi i te parahi ka piki ake te whakapaunga hiko, te whakaputa wera, me te rahi o te mate—ka kore e taea te whakakapi i raro i ngā mahere hangarau o nāianei me te mea ka taea te matapae.

Tirohanga: Te Whakapūmau i te Tuku i roto i te Mākete Tino Hiahia

I te mea e anga whakamua ana ngā whare hanga ki te taumata tika o te angstrom i te tau 2026, he mea nui ake te mahi tahi me ngā kaiwhakarato e tuku ana i ngā ūnga parahi parakore-teitei kua whaimanahia, te whakahaere witi tika, me te whai i te katoa.

Kei a mātou he whānuitanga o ngā whāinga parahi papatahi, hurihuri, me ngā whāinga parahi ritenga me te tuku tere me te tautoko hangarau tohunga. Tirohia ā mātourārangi ūnga pupuhi or whakapā atu ki ā mātou tohungamō ngā otinga kua whakaritea mō ngā tono haurua-ā-ira, whakaaturanga, pūngao rā rānei.

Ko ngā whāinga whakapūkara parahi parakore-teitei kei te whakakaha tonu i ngā hangarau e hanga ana i āpōpō—e tuku ana i te mahi e kore e taea te rite.